6.777: Design and Fabrication of Microelectromechanical Devices
Prereq: 6.003, 8.02, 6.152J or permission of instructor
Graduate H Credit
Microelectromechanical devices (MEMS), such as pressure sensors, accelerometers, rate gyroscopes, and opto-mechanical assemblies and displays, require knowlege of a broad range of disciplines, from microfabrication to mechanics to electromagnetism. This subject presents an introduction to this broad field, using examples and design projects drawn from real-word MEMS applications. Lectures during the first 2/3 of the term will cover material properties, microfabrication technologies, structural behavior, piezoresistive and capacitive sensing, electrostatic actuation, fluid damping, amplifiers, noise, and feedback systems. Student teams will design a microsystem (sensors/actuators, electronics, and feedback) to meet a set of specifications (sensitivity, frequency response, linearity) using a realistic microfabrication process. Modeling and simulation in the design process is emphasized. Along the way, student exercises will develop skills in locating suitable information from libraries and electronic archives, visualization of structures created with microfabrication process sequences, creation of low-order dynamical device models, and insertion of those models into the simulation of a complete electronic measurement circuit. This subject carries 4 Engineering Design Points toward the EECS B.S. and M.Eng. requirements.