6.777J/2.751J
Material Property Database
Material: parylene
|
Property |
Value |
Reference |
Image/URL (optional) |
|
|
1.289 |
Speciality Coating Systems web page |
|
|
Young's modulus |
400,000 |
Speciality Coating Systems web page |
|
|
Poisson ratio |
0.4 |
Residual Stress in Thin-Film Parylene-C,
T. A. Harder et. al., MEMS 2002 |
|
|
Stiffness Constants |
|
|
|
|
Tensile or fracture strength |
10,000 (psi) |
Speciality Coating Systems web page |
|
|
Residual stress on silicon |
37.8 – 44.4 (depending on annealing temp) |
Residual Stress in Thin-Film Parylene-C,
T. A. Harder et. al., MEMS 2002 |
|
|
Specific heat |
0.17 |
Specialty Coating Systems web page |
|
|
Thermal conductivity |
2.0x10-4 |
Specialty Coating Systems web page |
|
|
Dielectric constant |
3.15 (60Hz) 3.10 (1KHz) 2.95 (1MHz) |
Specialty Coating Systems web page |
|
|
Index of refraction |
1.639 |
Specialty Coating Systems web page |
|
|
Electrical conductivity |
10-14 |
Specialty Coating Systems web page |
|
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Magnetic permeability |
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Piezoresistivity |
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Piezoelectricity |
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Wet etching method |
none |
Robust Parylene-to-Silicon
Mechanical Anchoring |
|
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Plasma etching method |
O2 plasma |
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|
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Adhesion to silicon dioxide |
bad. can be improved by A-174 silane |
Flexible Parylene Actuator
for Micro Adaptive Flow Control, T. N. Pronsin-Sirirak
et. al., MEMS 2001 |
|
|
Biocompatibility |
very good |
|
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Hydrophobicity |
(highly hydrophobic) |
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Melting Point |
290 |
Specialty Coating Systems web page |
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