6.777J/2.751J Material Property Database

 

Material: PDMS (polydimethylsiloxane)

 

Property

Value

Reference

Image/URL (optional)

Mass density

0.97 kg/m3

Polymer Data Handbook, Mark J., Oxford Univ. Press, New York (1999)

 

Young's modulus

360-870 KPa

Re-configurable Fluid Circuits by PDMS Elastomer Micromachining

http://mass.micro.uiuc.edu/ publications/papers/26.pdf

Poisson ratio

0.5

Polymer Data Handbook

 

Stiffness Constants

 

 

 

Tensile or fracture strength

2.24 MPa

Polymer Data Handbook

 

Residual stress on silicon

 

 

 

Specific heat

 1.46 kJ/kg K

Polymer Data Handbook

 

Thermal conductivity

0.15 W/m K

Polymer Data Handbook

 

Dielectric constant

2.3-2.8

Polymer Data Handbook

 

Index of refraction

1.4

Polymer Data Handbook

 

Electrical conductivity

4x1013 Ωm

Polymer Data Handbook

 

Magnetic permeability

0.6x106 cm3/g

Polymer Data Handbook

 

Piezoresistivity

N/A

 

 

Piezoelectricity

N/A

 

 

Wet etching method

tetrabutylammonium fluoride (C16H36FN) + n-methyl-2-pyrrolidinone (C5H9NO)  3:1

J. Garra, T. Long, J. Currie, T. Schneider, R. White, M. Paranjape, “Dry Etching of

Polydimethylsiloxane for Microfluidic Systems”, Journal of

http://scitation.aip.org/journals/doc/JVTAD6-ft/vol_20/iss_3/975_1.html

Plasma etching method

CF4+O2

J. Garra, T. Long, J. Currie, T. Schneider, R. White, M. Paranjape, “Dry Etching of

Polydimethylsiloxane for Microfluidic Systems”, Journal of Vacuum Science and Technology, A20, pp

975-982, 2002.

http://scitation.aip.org/journals/doc/JVTAD6-ft/vol_20/iss_3/975_1.html

Adhesion to silicon dioxide

Excellent

Re-configurable Fluid Circuits by PDMS Elastomer Micromachining

http://mass.micro.uiuc.edu/ publications/papers/26.pdf

Biocompatibility

Noniritating to skin, no adverse effect on rabbits and mice, only mild inflammatory reaction when implanted

Polymer Data Handbook;

Belanger MC, Marois Y. Hemocompatibility, biocompatibility,

inflammatory and in vivo studies of primary reference materials

low-density polyethylene and polydimethylsiloxane: a review.

J Biomed Mater Res 2001;58(5):467–77.

 

Hydrophobicity

Highly hydrophobic, contact angle 90-120°

Re-configurable Fluid Circuits by PDMS Elastomer Micromachining

http://mass.micro.uiuc.edu/ publications/papers/26.pdf

Melting Point

-49.9–40°

Knovel Critical Tables