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Property
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Value
|
Reference
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Image/URL (optional)
|
|
 Mass density
|
1170-1200MPa
|
http://www.io.tudelft.nl/research/dfs/idemat/Onl_db/Id123p.htm
|
|
|
Young's
modulus
|
1800-3100 MPa
|
http://www.io.tudelft.nl/research/dfs/idemat/Onl_db/Id123p.htm
|
|
|
Poisson
ratio
|
0.35-0.4
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http://www.goodfellow.com/csp/active/static/A/ME30.HTML
|
|
|
Stiffness
Constants
|
2944MPa (modulus of elasticity)
|
http://www.tstar.com/Materials/ShowDetail.asp?Menu=&Type_ID=497
|
|
|
Tensile or
fracture strength
|
48-76 MPa
|
http://www.io.tudelft.nl/research/dfs/idemat/Onl_db/Id123p.htm
|
|
|
Residual
stress on silicon
|
|
|
|
|
Specific
heat
|
1466 J/kg/K
|
http://www.io.tudelft.nl/research/dfs/idemat/Onl_db/Id123p.htm
|
|
|
Thermal
conductivity
|
0.167-0.25 W/m.K
|
http://www.io.tudelft.nl/research/dfs/idemat/Onl_db/Id123p.htm
|
|
|
Dielectric
constant
|
2.6 at 1MHz
|
http://www.goodfellow.com/csp/active/static/A/ME30.HTML
|
|
|
Index of
refraction
|
1.492
|
http://www.io.tudelft.nl/research/dfs/idemat/Onl_db/Id123p.htm
|
|
|
Electrical
conductivity
|
1E-19 (inverse of resistivity)
|
http://www.io.tudelft.nl/research/dfs/idemat/Onl_db/Id123p.htm
|
|
|
Magnetic
permeability
|
|
|
|
|
Piezoresistivity
|
|
|
|
|
Piezoelectricity
|
|
|
|
|
Wet etching
method
|
Possible using any chemical
that can degrade PMMA
Examples: aldehydes,
ether, ammonia, acetone
|
See complete list on http://www.bohlender.de/e/x.pdf
|
|
|
Plasma
etching method
|
OK with O2
|
M. J. Madou, Fundamentals
of Microfabrication, 2000
|
|
|
Adhesion to
silicon dioxide
|
Yes possible: PMMA is often
used as a mask. Use 0.8% of BPO(benzoyl peroxide)
to improve adhesion
|
M. J. Madou, Fundamentals
of Microfabrication, 2000
|
|
|
Biocompatibility
|
Yes: used for diverse
biomaterials: bone cement, dializer, scaffolds
for tissue engineering, etc.
|
http://www.annanurse.org/resource/corpmem/toray.htm
|
|
|
Hydrophobicity
|
Pretty hydrophobic: contact
angle = 72degres
|
http://www.micromemanalytical.com/CAngle/ConAngl.htm
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