6.777J/2.751J
Material Property Database
Material:
Pyrex Glass
|
Property |
Value |
Reference |
Image/URL (optional) |
|
|
2.23
g/cm³ |
www.valleydesign.com/pr16.htm#7740 |
physics.nist.gov/cgi-bin/Star/compos.pl?matno=169 |
|
Young's modulus |
67 GPa |
http://www.bibby-sterilin.co.uk/internet/bibbysite.nsf/
AllDocumentsByDocIndex2/ |
http://mail.mems-exchange.org/pipermail/mems-talk/ |
|
Poisson ratio |
0.2 |
http://www.bibby-sterilin.co.uk/internet/bibbysite.nsf/
AllDocumentsByDocIndex2/ |
http://mail.mems-exchange.org/pipermail/mems-talk/ |
|
Stiffness Constants |
? |
? |
? |
|
Fracture Toughness |
0.77 |
-- |
http://65.108.128.37/pub/prodsvc/corning-pyrex-properties.php |
|
Residual stress on silicon |
|
|
|
|
Specific heat |
750 J/kg-K |
http://www.bibby-sterilin.co.uk/internet/bibbysite.nsf/
AllDocumentsByDocIndex2/ |
http://mail.mems-exchange.org/pipermail/mems-talk/ |
|
Thermal conductivity |
1.143W/m-K |
http://www.irmm.jrc.be/rm/physical.pdf |
http://mail.mems-exchange.org/pipermail/mems-talk/ |
|
Dielectric constant |
4.6 (1MHz, 20C) |
http://www.bibby-sterilin.co.uk/internet/bibbysite.nsf/
AllDocumentsByDocIndex2/ |
http://mail.mems-exchange.org/pipermail/mems-talk/ |
|
Index of refraction |
1.474 (Sodium D line) |
http://www.bibby-sterilin.co.uk/internet/bibbysite.nsf/
AllDocumentsByDocIndex2/ |
http://mail.mems-exchange.org/pipermail/mems-talk/ |
|
Electrical resistivity |
400 MΏ-m |
Electric Resistance
|
http://hypertextbook.com/physics/electricity/resistance/ |
|
? |
? |
? |
|
|
Piezoresistivity |
-- |
-- |
-- |
|
Piezoelectricity |
? |
? |
? |
|
Wet etching method |
TMAH |
-- |
http://mintlab.snu.ac.kr/PaperArchive/2001_IC_10.pdf |
|
Plasma etching method |
SF6 |
X. Li, T. Abe and M. Esashi, “Deep reactive ion etching of Pyrex glass using SF6
plasma,” Sensors and Actuators A: Physical, vol. 87, no 3, pp.
139-145, 2001. |
http://www.k-ids.or.kr/jid/paper/Jid_2-4/dsp12-3.pdf |
|
Adhesion to silicon dioxide |
Good |
-- |
http://www.enee.umd.edu/class/enee605/grp/fg4_report.pdf |
|
Biocompatibility |
Good |
Accelerated Testing Of Anodically
Bonded Glass-Silicon Packages In Salt Water M. R. Dokmeci, J. A. Von Arx and K. Najafi Center for Integrated Sensors and Circuits |
http://www.eecs.umich.edu/najafi/pdf/Paper_80.pdf |
|
Hydrophobicity |
0° |
Influence of surface wettability
on friction and wear tests Borruto, A. (Rome Univ., Italy); Crivellone, G.; Marani, F. Source: Wear,
v 222, n 1, Nov. 1998, p 57-65 |
http://www.engineeringvillage2.org/ohubservice/servlet /OHUBService?ohubIDType=ip&reason=get&ISSN=0043-1648&firstPage=57&firstVolume=222&firstIssue= 1&DOCID=inspec_base906134328 |
