Massachusetts Institute of Technology |
6.777J/2.751J |
Spring 2004 |
Course Schedule |
Day |
Date |
Subject |
Reading |
Issued |
Due |
Projects |
Lecturer |
W |
2/4 |
Introduction to MEMS |
Ch 1,2 |
|
|
|
JV |
F |
2/6 |
Microfabrication &
micromachining |
Ch 3,4 |
PS1 |
|
|
CL |
W |
2/11 |
Micromachining & process
integration |
Ch 3,4 |
|
|
|
CL |
F |
2/13 |
Material properties |
- |
PS2 |
PS1 |
|
CL |
W |
2/18 |
Lumped modeling |
Ch 5 |
|
|
|
JV |
F |
2/20 |
Energy-conserving transducers |
Ch 6 |
PS3 |
PS2 |
|
JV |
W |
2/25 |
Dynamics, especially nonlinear |
Ch 7 |
|
|
|
JV |
F |
2/27 |
Elasticity |
Ch 8 |
|
|
|
CL |
W |
3/3 |
Structures |
Ch 9 |
PS4 |
PS3 |
|
CL |
F |
3/5 |
Energy methods |
Ch 10 |
|
|
Define projects |
CL |
W |
3/10 |
Thermal energy domain;
dissipation |
Ch 11 |
|
|
|
JV |
F |
3/12 |
Modeling dissipative processes |
Ch 12 |
PS5 |
PS4 |
Collect prefs |
JV |
W |
3/17 |
Fluids-1 |
Ch 13 |
|
|
|
JV |
F |
3/19 |
Fluids-2 |
Ch 13 |
PS6 |
PS5 |
Assign teams |
JV |
W |
3/24 |
--- SPRING BREAK --- |
|
|
|
|
- |
F |
3/26 |
--- SPRING BREAK --- |
|
|
|
|
- |
W |
3/31 |
Transport |
- |
|
|
|
JV |
F |
4/2 |
Electronics |
Ch14 |
|
|
|
JV |
W |
4/7 |
Feedback |
Ch 15 |
PS7 |
PS6 |
Prelim report |
JV |
F |
4/9 |
Noise |
Ch 16 |
|
|
|
CL |
W |
4/14 |
Packaging |
- |
|
|
|
CL |
F |
4/16 |
From MEMS to NEMS |
Ch 17 |
|
|
|
CL |
W |
4/21 |
Capacitive accelerometer |
Ch 19 |
|
|
|
JV |
F |
4/23 |
BioMEMS case study |
Ch 22 |
|
|
Interim report |
JV |
W |
4/28 |
Piezoresistive pressure sensor |
Ch 18 |
|
PS7 |
|
CL |
F |
4/30 |
Optical MEMS case study |
Ch 20 |
|
|
|
CL |
W |
5/5 |
Video Day |
|
|
|
|
SDS |
F |
5/7 |
Amazing guest lecture |
|
|
|
|
TBD |
W |
5/12 |
FINAL PRESENTATIONS |
|
|
|
|
|
R |
5/13 |
REPORTS DUE |
|
|
|
Final report |
|
|
|
|
|
|
|
|
|