| Massachusetts Institute of Technology | |||||||
| 6.777J/2.751J | |||||||
| Spring 2004 | |||||||
| Course Schedule | |||||||
| Day | Date | Subject | Reading | Issued | Due | Projects | Lecturer |
| W | 2/4 | Introduction to MEMS | Ch 1,2 | JV | |||
| F | 2/6 | Microfabrication & micromachining | Ch 3,4 | PS1 | CL | ||
| W | 2/11 | Micromachining & process integration | Ch 3,4 | CL | |||
| F | 2/13 | Material properties | - | PS2 | PS1 | CL | |
| W | 2/18 | Lumped modeling | Ch 5 | JV | |||
| F | 2/20 | Energy-conserving transducers | Ch 6 | PS3 | PS2 | JV | |
| W | 2/25 | Dynamics, especially nonlinear | Ch 7 | JV | |||
| F | 2/27 | Elasticity | Ch 8 | CL | |||
| W | 3/3 | Structures | Ch 9 | PS4 | PS3 | CL | |
| F | 3/5 | Energy methods | Ch 10 | Define projects | CL | ||
| W | 3/10 | Thermal energy domain; dissipation | Ch 11 | JV | |||
| F | 3/12 | Modeling dissipative processes | Ch 12 | PS5 | PS4 | Collect prefs | JV |
| W | 3/17 | Fluids-1 | Ch 13 | JV | |||
| F | 3/19 | Fluids-2 | Ch 13 | PS6 | PS5 | Assign teams | JV |
| W | 3/24 | --- SPRING BREAK --- | - | ||||
| F | 3/26 | --- SPRING BREAK --- | - | ||||
| W | 3/31 | Transport | - | JV | |||
| F | 4/2 | Electronics | Ch14 | JV | |||
| W | 4/7 | Feedback | Ch 15 | PS7 | PS6 | Prelim report | JV |
| F | 4/9 | Noise | Ch 16 | CL | |||
| W | 4/14 | Packaging | - | CL | |||
| F | 4/16 | From MEMS to NEMS | Ch 17 | CL | |||
| W | 4/21 | Capacitive accelerometer | Ch 19 | JV | |||
| F | 4/23 | BioMEMS case study | Ch 22 | Interim report | JV | ||
| W | 4/28 | Piezoresistive pressure sensor | Ch 18 | PS7 | CL | ||
| F | 4/30 | Optical MEMS case study | Ch 20 | CL | |||
| W | 5/5 | Video Day | SDS | ||||
| F | 5/7 | Amazing guest lecture | TBD | ||||
| W | 5/12 | FINAL PRESENTATIONS | |||||
| R | 5/13 | REPORTS DUE | Final report | ||||