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Herbert H. Sawin

Professor of Chemical Engineering
Professor of Electrical Engineering and Computer Science
herbert h. sawin

Department of Chemical Engineering
Massachusetts Institute of Technology
Room 66-568
77 Massachusetts Ave
Cambridge MA 02139 USA

 Phone: 617.253.4570
Fax: 617.253.2072
Email: hhsawin@mit.edu
Web: http://web.mit.edu/hhsawin/www

Ph.D., University of California at Berkeley, 1980
B.S., Iowa State University, 1973

Honors and Awards
Professional Achievement Citation in Engineering, Iowa State University, 1994
Thinker Award presented by Tegal Corporation for Innovative Characterization and Modeling of Plasma Etching Processes, 1987

Research Interests
_ directional plasma etching
_ dry wafer cleaning
_ kinetics
_ surface science
_ process modeling

Sawin Squad

Current Research
Selected Publications and Lectures