Mark L. Schattenburg Senior Research Scientist MIT Kavli Institute of Astrophysics and Space Research Director Space Nanotechnology Laboratory Associate Director NanoStructures Laboratory Senior Research Staff Microsystems Technology Laboratories Room: 37-487 Phone: 617.253-3180 Email: marks@space.mit.edu Web: http://snl.mit.edu/personal_pages/marks/schattenburg.html

Ph.D., Massachusetts Institute of Technology, 1984
S.B., University of Hawaii, 1978

Research Interests

• Micro/nanofabrication technology
• Optical and x-ray interferometry
• Advanced lithography
• Nano-metrology
• X-ray optics and instrumentation
• High-resolution x-ray spectroscopy
• Space physics instrumentation utilizing nanotechnology

ISN Strategic Research Areas

• Strategic Research Area 04: Chem/Bio Materials Science - Detection and Protection

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