Henry I. Smith Professor of Electrical Engineering Department of Electrical Engineering and Computer Science Director NanoStructures Laboratory Room: 39-427 Phone: 617.253.1960 Fax: 617.253.6865 Email: hismith@nano.mit.edu Web: http://rleweb.mit.edu/rlestaff/p-hsmith.htm

Ph.D., Boston College, 1966
M.S., Boston College, 1960
B.S., Holy Cross, 1958

Research Interests

• nanofabrication
• deep-submicron MOSFETs
• quantum-effect electronics in sub-100-nanometer structures
• crystal films on amorphous and nonlattice-matching substrates
• di ffractive elements for x-ray optics and spectroscopy

ISN Strategic Research Areas

• Strategic Research Area 04: Chem/Bio Materials Science - Detection and Protection

Building NE47, 4th Floor, 77 Massachusetts Avenue Cambridge, MA 02139 (617) 324-4700 isn@mit.edu