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MIT Course Catalog 2014-2015

Home > Interdisciplinary Programs > Interdisciplinary Research & Study > Microsystems Technology Laboratories

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Microsystems Technology Laboratories

The Microsystems Technology Laboratories (MTL) provide modern fabrication facilities to enable research and education in nano- and micro-technologies.

The MTL facilities consist of fully equipped cleanroom laboratories and associated design, simulation, testing, and characterization infrastructure, as well as an extensive computational network, supporting wide array of design and layout tools.

MTL's nano-/micro-fabrication, testing, and computational facilities are available to the entire MIT community as well as researchers from other universities or government laboratories. MTL is also available for limited industrial participation.

Research at MTL is conducted in four separate spaces: the Integrated Circuits Laboratory (ICL), the Technology Research Laboratory (TRL), the Exploratory Materials Laboratory (EML), and the Electron Beam Lithography Laboratory (EBL). ICL has been designed, equipped, and staffed to serve as a highly advanced silicon integrated circuit, device, structures, and process research facility. TRL supports the development of novel process technologies by providing facilities for the fabrication of novel micro- and nano-structures. EML is a highly flexible lab with all basic fabrication capabilities and almost no restriction on materials. The EBL provides advanced lithographic services using a high-resolution fast through-put Elionix F-125 e-beam writer; it is jointly managed by MTL and the Research Laboratory of Electronics.

More than 145 faculty and senior research staff, 650 graduate students, 150 undergraduates, and 20 postdoctoral associates are involved in ongoing activities at MTL. Approximately 55 PhD and 45 SM and MEng degrees whose primary area of research is strongly coupled to MTL facilities are awarded each academic year.

For information regarding MTL's technical operations and capabilities, contact Dr. Vicky Diadiuk, associate director for operations, 617-253-0731, For information regarding MTL programs and other general information, contact Samuel Crooks, associate director for administration, 617-253-3978,


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