The Microsystems Technology Laboratories (MTL) provide modern microelectronics fabrication laboratories, including cleanrooms, design and testing facilities to enable research and education in microelectronic/microfabrication technology. MTL microfabrication, testing, and computational facilities are open to the entire MIT community and researchers from other university or government laboratories, as well as limited industrial participation.
MTL facilities consist primarily of fully equipped cleanroom microfabrication laboratories and associated design, simulation, testing, and characterization infrastructure, as well as an extensive computational network, supporting a wide array of design and layout tools.
Process research and device fabrication at MTL are primarily conducted in three laboratories, the Integrated Circuits Laboratory (ICL), the Technology Research Laboratory (TRL) and the Exploratory Materials Laboratory (EML). ICL is designed, equipped and staffed to serve as a highly advanced silicon integrated circuit, device, structures, and process research facility. TRL supports the development of novel process technologies and provides facilities for the fabrication of novel micro and nanostructures. EML is a highly flexible microfabrication resource with all the basic fabrication capabilities and few limitations.
More than 125 faculty and senior research staff, 550 graduate students, 150 undergraduates, and 20 postdoctoral associates are involved in ongoing activities at MTL. Approximately 55 PhD and 45 SM and MEng degrees whose primary area of research is strongly coupled to MTL facilities are awarded each academic year.
For information regarding MTL's technical operations and capabilities, contact Dr. Vicky Diadiuk, associate director for operations, 617-253-0731, diadiuk@mtl.mit.edu. For information regarding MTL programs and other general information, contact Samuel Crooks, associate director for administration, 617-253-3978, crooks@mtl.mit.edu.