Electron Microscopy
Featured Equipment
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Transmission Electron Microscopy (TEM) allows the researcher to form images of thin slices or finely divided powders of samples at a resolution of down to 0.18nm. Crystal structure may be analyzed by means of electron diffraction, and chemical analysis, with a sensitivity (in ideal cases) of a few atoms and spatial resolution (again, in ideal cases) of about 0.5nm, may be performed by energy-dispersive X-ray analysis (EDX) or electron energy-loss analysis (EELS).
The Scanning Electron Microscope (SEM) is a tool for visualizing the surface of solid samples, with a resolution (depending on the application) that can approach 1nm. Energy-dispersive X-ray analysis can be used to analyze volumes with dimensions of around 1 micron with a sensitivity of about 0.1wt%, while back-scatter electron imaging allows the visualization of regions of different composition (in many cases). Crystallographic orientation and structure can be examined using backscatter electron diffraction analysis, though sample preparation requirements for this technique are very stringent and limit the number of samples that can be studied in this way.
Personnel
Dr. Shiahn Chen, Research Specialist
Room 13-1027
Phone: (617) 253-4622
Fax: (617) 258-6478
E-mail: schen3j@mit.edu
Patrick Boisvert, Technical Associate
Room 13-1018
Phone: (617) 253-3317
Fax: (617) 258-6478
E-mail: pboisver@mit.edu
Dr. Yong Zhang, Research Specialist
Room 13-1034
Phone: (617) 253-5092
Fax: (617) 258-6478
E-mail: yzhang05@mit.edu
Location:
Building 13, 1st floor (entrance via Room 1012). Please note: The EM facility cannot be accessed from all points of entry to the building. When entering from the front of Building 13: Do not enter the main lobby--turn right, walk to the end of the building, and turn left. Enter the thru the black metal door. The door to the EM suite is straight ahead.
Instruments available:
Transmission Electron Microscopes
JEOL 2010 FEG Analytical Electron Microscope
A multipurpose high resolution analytical electron microscope with high resolution image quality and high analytical performance, micro EDS X-ray analysis. The system is also equipped with a Gatan Imaging Filter (GIF), a scanning image observation device (ASID), and TV units.
JEOL 2010 Advanced High Performance TEM
This instrument is an advanced, digitally controlled dedicated high-resolution transmission electron microscope operating at 200KV with a lanthanum hexaboride cathode. It is capable of an ultimate point-to-point resolution of 0.19 nm, with the ability to image lattice fringes at 0.14 nm resolution.
JEOL 2011 High Contrast Digital TEM
A high performance TEM with advanced features and functions. It has a unique cathodoluminescence detection system, and a liquid nitrogen cooled sample holder is available for cryogenic imaging.
JEOL 200CX General Purpose TEM
The JEOL 200CX is a high-quality general-purpose 200KV transmission electron microscope of traditional (analog) design. It has a high tilt side-entry pole-piece and goniometer capable of up to 60 degrees of tilt. A hot stage is available for this instrument.
Scanning Electron Microscopes
JEOL 6320FV Field-Emission High-resolution SEM
An ultra-high-resolution scanning electron microscope capable of secondary-electron image resolution of less than 1.25 nm when operating at 15KV, and about 2.5nm when operating at 1KV. It is fully digital and incorporates an image archiving computer. It is also equipped with a back-scatter electron detector and an energy-dispersive x-ray detector.
FEI/Philips XL30 FEG ESEM
A high performance, extremely flexible and well-equipped microscope for high quality microscopy, and low-vacuum and environmental scanning microscopy (ESEM). It has an EDAX X-ray detector for elemental analysis. Resolution at 30KV is 3.5 nm. The minimum magnification is about 20x.
JEOL 5910 General Purpose SEM
A general purpose SEM, with the following attributes: very easy to use, remotely accessible via the web, Rontec EDX system for elemental analysis and mapping, and can view the entire surface of a 20cm wafer.
Computation:
Five basic types of computing needs: image digitization, image simulation, image processing and analysis, utilities, and output devices.
Specimen Preparation Equipment
The EM lab offers various equipment for specimen preparation with different techniques.
- Fischione 1010 Ion Mill
- Gatan Dual Ion Mil
- Gatan Precision Ion Polishing System
- Precision Ion Polishing System (PIPS)
- Gatan High Resolution Ion Beam Coater
- VCR Group Incorporated D500i Dimpler
- Denton Thermo Vacuum Evaporator
- Edwards Thermo Vacuum Evaporator
- MT-X Ultramicrotome
- Gatan 601 Ultrasonic Cutter
