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THE NANOGATE: A TUNABLE MEMS LC FILTER

Alexander Slocum
Department of Mechanical Engineering
Jeffrey Lang
Department of Electrical Engineering / Computer Science
The Nanogate is a MEMS device capable of nanometer-scale control over
separation of two millimeter-scale polished surfaces, resulting in
aspect ratios greater than 106. Gap control between two large surfaces
with nanometer resolution presents many new opportunities. For example,
it could improve the design of devices and instruments such as tunable
LC filters or microfluidic control valves that could have implications
for drug discovery.
This research will focus mainly on developing the Nanogate LC for
personal multi-band wireless communications devices. The researchers
anticipate that they can realize cost savings of up to 20% and better
performance. And considering that the annual sales growth in mobile
phone handsets is forecast to remain at 15%-20% until 2005, the market
is certainly ready..
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