Deshpande Center for Technological Innovation MIT School of Engineering

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A 3 DIMENSIONAL LITHOGRAPHIC MICROFABRICATION SYSTEM
Ignition Grant

Peter So
Department of Mechanical Engineering

The efficiency of photolithography for 2D microfabrication is responsible for ushering in the microelectronics era. This project will use a novel 3D photolithography technique that is based on novel focusing of ultrafast light pulses to develop a new type of 3D microfabrication system. This would allow high resolution structures to be built rapidly. These structures could be used in fields including data storage, photonic devices, microfluidics, and tissue engineering.