Outside links:
Microbeam Analysis Society
Microscopy Society of America

| Theory || Qualitative analysis || Quantitative analysis || Back-scattered and secondary electron imaging || Cathodoluminescence imaging |

The Electron Microprobe, also known as the Electron Probe X-ray Microanalyzer (EMPA), is a powerful and well established analytical tool that provides non-destructive, in situ and complete quantitative chemical analysis of a flat solid surface with a spatial resolution of ~2 micron through X-ray emission spectrometry. It also provides high-resolution scanning electron and elemental X-ray images (concentration maps) showing spatial distribution of elements. A variety of earth, extraterrestrial and artificial materials including minerals, glasses, ceramics, metals and superconductors can be analyzed. Click on the different parts of the image below for details of the method:

Our JEOL JXA-733 electron microprobes are equipped with:

• Up to five wavelength dispersive spectrometers (WDS)working simultaneously and providing quantitative analysis of all elements with atomic number >4 (B to U) with minimum detection limits of ~10 ppm under favorable conditions. We have a large standard collection for analysis of most elements.
• The WDS can also be used to obtain X-ray maps showing elemental distributions.
• Energy dispersive spectrometer for quick qualitative analysis.
• Back-scattered electron detector for high resolution compositional imaging.
• Secondary electron detector for high resolution topographic imaging.
• An orthogonal translational stage that can hold up to seven 1-inch diameter sample mounts or a large sample (up to 80 mm x 80 mm) of irregular shape.
• Photomultiplier for cathodoluminescence imaging.
• Our sample preparation facility includes diamond wafering blades, polishing grits and papers, lap-wheel units, automatic polishers, optical microscopes and carbon coaters.

Send comments to e-probe-www@mit.edu

(Last Revised 11/29/2007 by Nilanjan Chatterjee)