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MIT

Facilities

1. A custom-built molecular beam epitaxy (MBE) system, with in-situ masking and surface characterization.

We have a custom-built molecular beam epitaxy (MBE) system ideally suited for growing not only planar tunnel junctions but also binary and ternary compound and alloy thin films. Its capabilities include: vacuum better than 8x10-11 Torr, up to four Knudsen cells and two five-pocket electron beam evaporation sources for evaporating up to four materials simultaneously; a home-built masking system accommodating 8 masks in-situ (feature size < 100um); X-ray photoelectron and Auger electron spectroscopy; substrate heating (> 900K) and cooling (80K); and a UHV load-lock chamber equipped with plasma oxidation/nitridation and an RF sputtering source.Three custom evaporation and sputtering systems with in-situ masking .

• Three High Vacuum deposition chambers(10-7 torr) with shodow masking and plasma oxidation.
• Automated electronics for TMR and GMR studies (ac lock-in, ac bridge, etc.) .Transport measurements (dc or ac lock-in) at temperatures from 0.4-400K, in magnetic fields up to 8T measured in a He3 cryostat.

Our He3 system shown here can reach temperatures of ~ 0.4K, and has a superconducting magnet for reaching magnetic fields of up to 8 Tesla. Designed to be compact and simple to operate, it requires only about 12 L of 4He liquid to run.

• Al wire bonder
• 0.5T electromagnet
• Room-temperature bore electromagnet, which reaches fields of ~ 0.5 Tesla. With our various metal and flow cryostat inserts, we can perform electrical and optical measurements at temperatures from ~ 1K to ~400K.

• SEM system (Carl Zeiss Leo Supra 25) with E-beam lithography, STEM and EDAX facilities

Shared Facilities (Harvard/MIT)

• Superconducting Quantum Interference Devices (SQUIDs)
  Two SQUID magnetometers are available (8T, 2K-800K, ac and dc) at the Center for Materials Science and Engineering
• X-ray laboratory Extensive x-ray laboratory with several diffractometers and accessories and software for pole figures, rocking curves, thin films, glancing incidence-angle analysis, and x-ray fluorescence
• Rutherford Backscattering spectroscopy