GLEASON LAB |
|
We are a materials science and chemical engineering
research group working with Professor
Karen K. Gleason in the Department
of Chemical Engineering at the Massachusetts
Institute of Technology. The Gleason Research Group is currently
conducting research in chemical vapor deposition and nuclear magnetic resonance.
We deposit thin films using plasma-enhanced and hot-filament chemical vapor
deposition. Materials under study include, but not limited to,
organosilicate glasses, fluorocarbon polymers, sacrificial materials, and
optoelectronic materials. |
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Last Updated: August 19, 2003
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