MEMS 101: An Overview from Design, to Processing, to Applications
Krishnan Sriram, Onnik Yaglioglu, Xue'en Yang, Alexis Weber, John Hart
Wed Jan 19, Thu Jan 20, 10am-12:00pm, 2-105
Enrollment limited: advance sign up required (see contact below)
Limited to 60 participants.
Participants requested to attend all sessions (non-series)
Microelectromechanical systems (MEMS) are an active and exciting area of research and industrial applications. A range of fabrication techniques exist today that allow MEMS, with features that range in size from sub-mm to mm, to be constructed. This short-course will provide an overview of the primary microfabrication techniques-- thin-film processing, surface and bulk micromachining, wafer bonding, and polymer fabrication. Process capability that exists within the MTL facility at MIT will be emphasized. The course will introduce techniques for modeling MEMS systems and include an overview of on-going MEMS research at MIT. All experience levels are welcome, however the course is designed for people with little to no prior MEMS experience.
Contact: Krishnan Sriram, 35-004, 252-2436, sriram@mit.edu
Sponsor: Mechanical Engineering
Latest update: 30-Nov-2004
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