MEMS 101
Hongshen Ma, Krishnan Sriram
Thu Jan 19, Fri Jan 20, 10am-12:30pm, 2-105
Enrollment limited: advance sign up required (see contact below)
Signup by: 10-Jan-2006
Limited to 60 participants.
Participants requested to attend all sessions (non-series)
Prereq: none
Microelectromechanical systems (MEMS) are an active and exciting area of research and industrial applications. A suite of fabrication techniques exist today that allow devices to be constructed with features that range in size from nanometers to millimeters. This short-course is designed to provide an overview of MEMS fabrication, commercial MEMS products, and areas of on-going research.
The course is organized into two 2.5 hour sessions. The first session will provide an overview of microfabrication techniques including thin-film processing, surface and bulk micromachining, and packaging techniques. The second session will discuss commercial MEMS applications and areas of on-going research in MEMS and Nanotechnology including MEMS sensors, optical devices, polymer fabrication, microfluidics, lab-on-a-chip, and nanomaterials.
Contact: Hong Ma, hongma@mit.edu
Sponsor: Mechanical Engineering
Cosponsor: Electrical Engineering and Computer Science
Latest update: 04-Jan-2006
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