MEMS 101
Cancelled
Nader Shaar, Daniel Truque
Wed Jan 17, Thu Jan 18, 11am-01:30pm, TBD
Enrollment limited: advance sign up required (see contact below)
Limited to 60 participants.
Participants requested to attend all sessions (non-series)
Microelectromechanical systems (MEMS) are an active area of research and industrial applications. A suite of fabrication techniques exist today that allow devices to be manufactured with features that range in size from nanometers to millimeters. This short course provides an overview of MEMS fabrication, commercial MEMS products, and areas of on-going research.
The course is organized into two 2.5 hour sessions. The first session will provide an overview of microfabrication techniques including thin-film processing, surface and bulk micromachining, and packaging techniques. The second session will discuss commercial MEMS applications and areas of on-going research in MEMS and Nanotechnology including MEMS sensors, optical devices, polymer fabrication, microfluidics, lab-on-a-chip, and nanomaterials.
Contact: Nader Shaar, 3-466, x8-0649, nshaar@mit.edu
Sponsor: Mechanical Engineering
Cosponsor: Electrical Engineering and Computer Science
Latest update: 07-Dec-2006
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