MEMS 101: Introduction to Microelectromechanical Systems
Nader Shaar, Daniel Truque
Tue Jan 16, Wed Jan 17, 12-02:30pm, 3-270
Enrollment limited: advance sign up required (see contact below)
Signup by: 12-Jan-2007
Limited to 60 participants.
Participants requested to attend all sessions (non-series)
Prereq: None
Microelectromechanical systems (MEMS) are an active area of research and industrial applications. A suite of fabrication techniques exist that allow devices to be manufactured with features that range in size from nanometers to millimeters. An overview of MEMS fabrication, commercial MEMS products, and areas of on-going research provided in two 2.5 hour sessions. The first covers microfabrication techniques including thin-film processing, surface and bulk micromachining, and packaging techniques. The second discusses commercial MEMS applications and areas of on-going research in MEMS and Nanotechnology including MEMS sensors, optical devices, polymer fabrication, microfluidics, lab-on-a-chip, and nanomaterials. (Lunch provided)
Web: http://web.mit.edu/nshaar/mems101
Contact: Nader Shaar, nshaar@mit.edu
Sponsor: Electrical Engineering and Computer Science
Cosponsor: Mechanical Engineering
Latest update: 29-Nov-2006
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