Introduction to the Scanning Electron and Focused Ion Beam Microscopy, Part 2: Focused Ion Beam (FIB)
Shiahn Chen, Patrick Boisvert
Thu Jan 28, 03:30-05:00pm, 13-2137
No enrollment limit, no advance sign up
Single session event
This lecture will cover the basic principles of ion source, optics and ion-material interaction in FIB with an emphasis on the differences from, and similarity to, the electron-beam instrument. In addition, the lecture will describe the configuration of the new FEI Helios 600 Nanolab Dual Beam workstation in the CMSE Electron Microscopy Facility, and conclude with application examples as well as open discussion of the material characterization and nanofabrication uses of the dual-beam workstation.
Contact: Shiahn Chen, 13-1027, 253-4622, schen3j@mit.edu
Sponsor: Center for Materials Science and Engineering
Latest update: 09-Nov-2009
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