MIT: Independent Activities Period: IAP

IAP 2017

Introduction to SEM/FIB Dual-Beam Workstation

Shiahn Chen, Research Specialist

Jan/26 Thu 03:00PM-04:00PM 13-2137

Enrollment: Unlimited: No advance sign-up
Prereq: None

This lecture will cover the basic principles of ion source, optics and ion-material interaction in a focused ion beam machine with an emphasis on the differences from, and similarities to, the electron-beam instrument. In addition, the lecture will describe the configuration of the FEI Helios 600 Nanolab Dual Beam workstation in the CMSE Electron Microscopy Facility, and conclude with application examples of the material characterization and nanofabrication uses of the dual-beam workstation.

Sponsor(s): Center for Materials Science and Engineering
Contact: Shiahn Chen, 13-1027, 253-4622,