| MIT Green Computing |
| An Examination of the Environmental Effects of Computers at MIT |
Semiconductor Process Chemicals
The computer manufacturing process is extremely complex, involving a number
of details and several solvents and compounds. The chemicals used in this process
are detailed below.
Next Section:Computer Composition
Chemicals Used in Computers
| CHEMICAL NAME | WT % 1 | CONSTITUENT 1 | WT % 2 | CONSTITUENT 2 | WT % 3 | CONSTITUENT 3 | HAZARD CLASS | LOCATION | QUANTITY | UNITS | CONTAINER | TEMPERATURE | PRESSURE | FED HAZARD CLASS | WASTE ANNUAL THRUPUT | STATE WASTE CODE | RECYCLED ON SITE | TREATED ON SITE | SHIPPED OFF SITE |
| Potassium Hydroxide Developer | CORR-L | I | 75 | Gal | CYL | = Ambient | > Ambient | -Acute | |||||||||||
| Isopropyl Alcohol | FL | S | 5 | Gal | CYL | = Ambient | > Ambient | -Fire | |||||||||||
| Hydrofluoric Acid | CORR-L | S | 12 | Gal | BOT-EQUP | > Ambient | = Ambient | -Acute | |||||||||||
| Sulfuric Acid & Hydrogen Peroxide | CORR-L | S | 12 | Gal | BOT-EQUP | > Ambient | = Ambient | -Acute | |||||||||||
| *Ultramac Solvent EPA | 85% | Propylene Glycol Monomethyl Ether Acetate | 8.50% | n-Butyl Acetate | 6.50% | Xylene | CL | AA | 20 | Gal | BOT | = Ambient | = Ambient | -Fire | |||||
| Negative Photoresist/HR-100 | >90% | Xylene | FL | AA | 130 | Gal | BOT | = Ambient | = Ambient | -Fire | |||||||||
| 1,1,1-Trichloroethane | POIS-L | AA | 5 | Gal | BOT | = Ambient | = Ambient | -Acute | |||||||||||
| Hexamethyldisalazane | FL | AA | 12 | Gal | BOT | = Ambient | = Ambient | -Fire | |||||||||||
| Hydrofluoric Acid | CORR-L | CC | 54 | Gal | BOT | = Ambient | = Ambient | -Acute | |||||||||||
| Buffered Oxide Etch | 10% | Hydrofluoric Acid | 50% | Ammonium Fluoride | CORR-L | CC | 54 | Gal | BOT | = Ambient | = Ambient | -Acute | |||||||
| Hydrochloric Acid | CORR-L | CC | 21 | Gal | BOT | = Ambient | = Ambient | -Acute | |||||||||||
| Ammonium Fluoride | CORR-L | CC | 18 | Gal | BOT | = Ambient | = Ambient | -Acute | |||||||||||
| Phosphoric Acid | CORR-L | CC | 24 | Gal | BOT | = Ambient | = Ambient | -Acute | IGHT> | ||||||||||
| Xylene | FL | Z | 12 | Gal | BOT | = Ambient | = Ambient | -Fire | |||||||||||
| Acetone | FL | Z | 4 | Gal | BOT | = Ambient | = Ambient | -Fire | |||||||||||
| Waste Corrosive Liquid, Acidic, Inorganic, NOS | CORR-L | WW1 | 10 | Gal | PAIL | = Ambient | = Ambient | -Acute | 20 | 792 | Shipped Off-Site | ||||||||
| Argon | NFG | Lab1 | 400 | Cu Ft | CYL | = Ambient | > Ambient | -Pressure Release | |||||||||||
| Nitrogen | NFG | Lab1 | 400 | Cu Ft | CYL | = Ambient | > Ambient | -Pressure Release |