 |
  

PhD, Massachusetts Institute of Technology, 1988
SM, Massachusetts Institute of Technology, 1983
BS, Rensselaer Polytechnic Institute, 1981
Research Interests
- microfabrication of sensors, actuators, and electronic
devices
- microelectromechanical Systems (MEMS)
- design of micromechanical sensors and actuators
- microfabrication technology

|
 |