Konrad Rykaczewski, Ph.D.
MIT & NIST
Electron Beam Induced Deposition (EBID): Fundamentals and Lowering of Electrical Contact Resistance of CNT Interconnects (Graduate Work)
In my graduate work, I studied the fundamentals of mass and electron transport in Electron Beam Induced Deposition (EBID) of nanostructures and the application of the process to lower electrical contact resistance of Multiwalled Carbon Nanotube (MWNT) and electrode junctions. I developed a comprehensive dynamic model of EBID by coupling the precursor mass transport, electron transport and scattering, and surface deposition reaction. I validated the model experimentally and used it to identify different EBID growth regimes, which affect both the growth rate and shape of the deposited nanostructures. Furthermore, I studied the formation of EBID-made carbon joint between the MWNT and the metal electrode. I determined dominant factors contributing to the overall electrical resistance of the MWNT-based electrical interconnect and relative importance of the shape and properties of EBID-made carbon contacts.