Alexei Maznev
List of publications
75. A.A. Maznev, T.A. Kelf, M. Tomoda, O. Matsuda and O.B. Wright, “Optical generation of surface acoustic waves guided at the linear boundary between two thin films”, J. Appl. Phys., 107, 033521 (2010).
74. A.A. Maznev and A.G. Every, “Surface acoustic waves in a periodically patterned layered structure”, J. Appl. Phys. 106, 113531 (2009).
73. A.G. Every and A.A. Maznev, “A Model for the dynamical behavior of patterned thin film structures on silicon”, in Proceedings of the 2009 Conference on Quantitative Nondestructive Evaluation, to be published.
72. A.A. Maznev and A.G. Every, “Guided elastic waves at periodically structured surfaces and interfaces”, in Proceedings of the 2009 IUTAM symposium on Recent Advances of Acoustic Waves in Solids, to be published.
71. A.A. Maznev and A.G. Every, “Surface acoustic waves with negative group velocity in a thin film structure on silicon”, Appl. Phys. Lett. 95, 011903 (2009).
70. A.A. Maznev and O.B. Wright, “Optical generation of long-lived surface vibrations in a periodic microstructure”, J. Appl. Phys. 105, 123530 (2009).
69. A.A. Maznev, “Laser-generated surface acoustic waves in a ring-shaped waveguide resonator”, Ultrasonics 49, 1-3 (2009).
68. A.A. Maznev, “Bandgaps and Brekhovskikh attenuation of laser-generated surface acoustic waves in a patterned thin film structure on silicon”, Phys. Rev. B 78, 155323 (2008).
67. M. Gostein and A.A. Maznev, “Infrared metrology of 3D structures”, Future Fab International 23, 107 (2007).
66. C.A. Durán, A.A. Maznev, G.T. Merklin, A. Mazurenko and M. Gostein, “Infrared reflectometry for metrology of trenches in power devices”, in Proceedings of 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp.175-179 (IEEE, 2007).
65. A.A. Maznev, A. Mazurenko, C. Durán and M. Gostein, “Measuring trench structures for microelectronics with model-based infrared reflectometry”, in Characterization and Metrology for Nanoelectronics, AIP Conference Proceedings Vol. 931, pp.74-78 (American Institute of Physics, 2007).
64. M. Gostein, P. A. Rosenthal, A. Maznev, A. Kasic, P. Weidner, P.-Y. Guittet, ”Measuring deep-trench structures with model-based IR”, Solid State Technology 49, No 3, 38-42 (2006).
63. A. Maury, J. Schaller, G. C. Lan, I. I. Yaacob, C. C. Meng, T. S. Huat, A. Maznev and K. Gomez, “Laser beam induced dielectric cracks in VLSI devices”, in Proc. of 12th Int. Symp. on the Physical and Failure analysis of Integrated Circuits, June-July 2005, Singapore (IEEE, 2005), p. 9-13.
62. F. Iacopi, S.H. Brongersma, A. Mazurenko, H. Struyf, G. Mannaert, Y. Travaly, A. Maznev, T.J. Abell, J. Tower and K. Maex, “Surface acoustic waves as a technique for in-line detection of processing damage to low-k dielectrics”, in Proceedings of the 2005 IEEE International Interconnect Technology Conference, p. 217-219 (IEEE, 2005).
61. A.A. Maznev, A. Mazurenko, M. Gostein, G. Alper, J. Tower and R. Carpio, “Monitoring Cu ECD using laser-based SAW measurements”, Solid State Technology 47, No 10, 43-46 (2004).
60. M. Gostein, A. Mazurenko, A.A. Maznev, and M.T. Schulberg, “Measuring Young’s modulus of low-k dielectrics using surface acoustic waves”, Micro 22, No 5, 51-61 (2004).
59. A.A. Maznev, A. Mazurenko, R. Carpio, M. Gostein, G. Alper, and J. Tower, “Monitoring thickness, resistivity and grain structure of electroplated copper films with laser-based surface wave metrology”, in Proceedings of 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (IEEE, Boston, 2004), p. 477-481.
58. A.A. Maznev, A. Mazurenko, G. Alper, C.J.L. Moore, M. Gostein,
M.T. Schulberg, R. Humayun, A. Sengupta, and J.-N. Sun, “Anisotropic elastic properties of low-k dielectric materials”, in MRS Symposium Proceedings Vol. 812 (Materials Research Society, 2004), p. F.5.9.1-6.
57. J. Tower, A. Maznev, M. Gostein, and K. Otsubo, “Measurement of electroplated copper overburden for advanced process development and control”,. ”, in MRS Symposium Proceedings Vol. 816 (Materials Research Society, 2004), p. 133-138.
56. A.A. Maznev, M. Gostein, and S.H. Brongersma, "Characterization of electroplated copper films with laser-generated surface acoustic waves", in Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics, Materials Research Society Proceedings Vol. 766, (Materials Research Society, Warrendale, 2003) p. 415-420. .
55. M. Gostein, A. Mazurenko, A. Maznev, J. Tower, S.H. Brongersma and M. Patz, “Measurement of elastic moduli of low-k dielectric films using laser-induced surface acoustic waves”, Proceedings of VLSI Multilevel Integration Conference (September 22-25, 2003).
54. A.A. Maznev, A. Mazurenko, L. Zhuoyun, and M. Gostein, "Laser-based surface acoustic wave spectrometer for industrial applications", Rev. Sci. Instrum. 74, 667 (2003).
53. A.A. Maznev, A.M. Lomonosov, P. Hess and Al.A. Kolomenskii, "Anisotropic effects in surface acoustic wave propagation from a point source in a crystal", European J. Phys. B 35, 429-439 (2003).
52. J.A. Rogers, A.A. Maznev and K.A. Nelson, "Impulsive stimulated thermal scattering", in Characterization of Materials, ed. E.N. Kauffmann (Wiley, 2003), pp. 744-759..
51. Y. Kann and A. Maznev, "Color control of interference pigments dispersed
in translucent media", Color Research and Application 27, 83 (2002).
50. M. Gostein, M. Banet, M. Joffe, A.A. Maznev, R. Sacco, J.A. Rogers, K.A. Nelson,.
"Thin film metrology using impulsive stimulated thermal scattering (ISTS)",
in Handbook of Silicon Semiconductor Metrology, ed. A.C. Diebold.
(New York: Marcel Dekker. 2001).
49. R.M. Slayton, K.A. Nelson and A.A. Maznev, "Transient grating measurements of film thickness in multilayer metal films", J. Appl. Phys., 90, 4392-4402 (2001).
48. M. Gostein, M. Joffe, A.A. Maznev, M. Banet, C.J.L. Moore, "Non-contact metal
film metrology using impulsive stimulated thermal scattering", in Characterization
and Metrology for ULSI Technology: 2000 International Conference, ed. by D.G. Seiler,
A.C. Diebold, T.J. Shaffner, R. McDonald, W.M. Bullis, P.J. Smith and E.M. Secula
(American Institute of Physics, 2001), p.478-488.
47. D. Nelsen, M. Gostein, A. Maznev, "Characterizing Elastic Properties of Low K
Dielectric Films Using Surface Acoustic Waves", in Proceedings of the Symposium on
Polymers for Microelectronics, Wilmington, Delaware, May 2000.
46. M. Gostein, P. Lefevre, A.A. Maznev, and M. Joffe, “Characterization and control of copper CMP with optoacoustic metrology,” in Chemical-Mechanical Polishing Advances and Future Challenges, Materials Research Society Symposium Proceedings Volume 671 (Materials Research Society, Warrendale, 2001), pp. M3.9.1-M3.9.6.
45. J.A. Rogers, A.A. Maznev, M.J. Banet, and K.A. Nelson, "Optical generation and
characterization of acoustic waves in thin films: fundamentals and applications".
Annual Review of Materials Science 30, 117-157 (2000).
44. A.A. Maznev, M.J. Banet, M. Gostein, R.B. Hanselman, M.A. Joffe, R. Sacco,
K.A. Nelson, "Precise determination of thin metal film thickness with laser-induced
acoustic grating technique" in Nondestructive Methods for Material Characterization,
MRS Symp. Proceedings Vol.591, ed. G. Baaklini, N. Meyendorf, T. Matikas, R. Gilmore (Materials Research Society, Warrendale, 2000), p. 195-200.
43. M. Gostein, M. Banet, M. Joffe, A. Maznev, R. Sacco, “All-optical metrology for rapid characterization of copper damascene structures,” Proceedings of VLSI Multilevel Integration Conference, Santa Clara, CA, 2000, (Institute for Microelectronics Interconnection, Tampa, Florida) pp. 6.G.1-6.G.6.
42. M. Joffe, R. Surana, D. Bennett, M. Gostein, S. Mishra, A.A. Maznev, M. Banet, C.J.L. Moore, R. Lum, R. Bajaj, “Non-contact optical measurement of post-CMP dishing and erosion of high-feature-density damascene structures,” Proceedings of Advanced Equipment Control and Advanced Process Control Symposium XII, 2000 (International SEMATECH, Austin, TX).
41. M. Gostein, M. Banet, M. Joffe, Alex Maznev and R. Sacco, “In-line process monitoring of metal films by transient grating optoacoustics (ISTS),” Metrology 2000 Conference Proceedings, 2000.
40. M. Gostein, T.C. Bailey, I. Emesh, A.C. Diebold, A.A. Maznev, M. Banet, M. Joffe,
and R. Sacco, "Thickness measurement for Cu and Ta thin films using optoacoustics.
Proceedings of the IEEE 2000 International Interconnect Technology (IEEE. Piscatawy, NJ,
2000), pp.176-8.
39. M. Banet, M. Joffe, M. Gostein, A.A. Maznev, and R. Sacco, “All-optical metrology for characterizing CMP of copper damascene structures,” Proceedings of CMP-MIC Conference, Santa Clara, 2000 (Institute for Microelectronics Interconnection, Tampa, Florida).
38. M. Banet, M. Joffe, M. Gostein, A.A. Maznev, R. Sacco, and F. Queromes, “All-optical, non-contact metrology for characterizing CMP of copper films,” Semiconductor Fabtech No. 11 (ICG Publishing, London, England, 2000), pp. 77-82.
37. A.A. Maznev, D.J. McAuliffe, A.G. Doukas, and K.A. Nelson, "Wide-band
acoustic spectroscopy of biological material based on a laser-induced
grating technique". Ultrasound in Medicine & Biology, 25, 601-7 (1999).
36. A.A. Maznev, A. Akthakul, and K.A. Nelson, "Surface acoustic modes in thin
films on anisotropic substrates". Journal of Applied Physics 86, 2818-24 (1999).
35. Al.A. Kolomenskii, V.G. Mikhalevich, A.A. Maznev, H.A. Schuessler, "Extending
laser cleaning techniques of surfaces to the sub-micron region by using nonlinear
SAW pulses”. Photoacoustic and Photothermal Phenomena X. Rome, Italy. 23-27 Aug.
1998. American Institute of Physics Conference Proceedings, no.463, 1999, pp.433-5.
34. M.A. Joffe, M. Gostein, A. Maznev, R. Sacco, R. Hanselman, and M.J. Banet, “Non-contact metal-film process control metrology,” Proceedings of VLSI Multilevel Integration Conference, Santa Clara, CA, 1999, (Institute for Microelectronics Interconnection, Tampa, Florida).
33. M.Banet, M. Fuchs, J.A. Rogers, R. Logan, A.A. Maznev and K.A. Nelson, ''High-precision film thickness determination using a laser-based ultrasonic technique'', Appl. Phys. Lett. 73, 169 (1998).
32. A.A. Maznev, T.F. Crimmins and K.A. Nelson, ''How to make femtosecond pulses overlap'', Opt. Lett. 23, 1378-80 (1998).
31. A.A. Maznev, J.A. Rogers and K.A. Nelson, ''Optical heterodyne detection of laser-induced gratings'', Opt. Lett. 23, 1319-21 (1998).
30. Al.A. Kolomenskii, H.A. Schuessler, V.G. Mikhalevich and A.A. Maznev, ''Interaction of laser-generated surface acoustic pulses with fine particles: Surface cleaning and adhesion studies'', J. Appl. Phys. 84, 2404-10 (1998).
29. T.F. Crimmins, A.A. Maznev, and K.A. Nelson, "Transient grating measurements of picosecond acoustic pulses in metal films", Appl. Phys. Lett., 74, 1344-6 (1998).
28. A.G. Every, A.A. Maznev and G.A.D. Briggs, ''Surface response of a fluid loaded anisotropic solid to an impulsive point force'', Phys. Rev. Lett. 79, 2478-2481 (1997).
27. R.Logan, A.A. Maznev, K.A. Nelson, and J. Megusar, ''Photothermal/photoacoustic method for in situ evaluation of radiation-hardened polyimide films'', Journal of Nuclear Materials 246, 256-259 (1997).
26. A.G. Every, K.Y. Kim and A.A. Maznev, ''Surface dynamic response functions of anisotropic solids'', Ultrasonics 36, 349-353 (1997).
25. A.A. Maznev, J. Hohlfeld and J. Guedde, ''Thermal expansion of metal under femtosecond laser irradiation'', J. Appl. Phys. 82, 5082 (1997).
24. A.G. Every, K.Y. Kim and A.A. Maznev, ''The elastodynamic response of a semi-infinite anisotropic solid to sudden surface loading'', J. Acoust. Soc. Am. 102, 1346-1355 (1997).
23. A.A.Maznev and A.G.Every, ''Time-domain dynamic surface response of an anisotropic elastic solid to an impulsive line force'', Int. J. Engng. Sci. 35, 321-327 (1997).
22. R.J. Logan, A.A. Maznev, K.A. Nelson, J.A. Rogers, M. Fuchs and M. Banet, ''Microelectronic thin film thickness determination using a laser-based ultrasonic technique'', Proceedings of the 1996 Fall MRS
Meeting, Symposium ''Structure and Evolution of Surfaces'' (Mater. Res. Soc., Pittsburg, 1997), p. xii+509, 347-52.
21. R.J. Logan, J. Megusar, A.A. Maznev, and K.A. Nelson, ''Noninvasive mechanical characterization of neutron-irradiated polymeric insulation materials'', Proceedings of the 1996 Fall MRS Meeting, Symposium ''Microstructure Evolution During Irradiation'' (Mater. Res. Soc., Pittsburg, 1997) p. xvi+731, 659-63.
20. A.A.Maznev, K.A.Nelson, and T.Yagi, ''Surface phonon spectroscopy with frequency-domain impulsive stimulated light scattering'', Solid State Commun. 100, 807-811 (1996).
19. A.A.Maznev and A.G.Every, ''Formation of surface phonon focusing caustics in crystals'', Solid State Commun. 97, 679 (1996).
18. A.A.Maznev, K.A.Nelson, and T.Yagi, ''Impulsive stimulated thermal scattering for sub-micron-thickness film characterization'', Thin Solid Films, 290-291, 294-298 (1996).
22. A.A.Maznev, Al.A.Kolomenskii and P.Hess, '' Time-resolved cuspidal structure in the wave front of surface acoustic pulses on (111) gallium arsenide'', Phys. Rev. Lett. 75, 3332 (1995).
21. A.A.Maznev and A.G.Every, ''Focusing of acoustic modes in thin anisotropic plates'', Acta Acustica 3, 387-391 (1995).
20. A.A.Maznev, J.Hartmann and M.Reichling, ''Thermal wave propagation in thin films on substrates'', J. Appl. Phys. 78, 5266 (1995).
19. O.W.Kading, H.Skurk, A.A.Maznev and E.Matthias, ''Transient thermal grating at surfaces for thermal characterization of bulk materials and thin films'', Applied Physics A. 61, 253-61 (1995).
18. Al.A.Kolomenskii and A.A.Maznev, ''Propagation of laser-generated surface acoustic waves visualized by shake-off of fine particles'', J. Appl. Phys. 77, 6052 (1995).
17. A.A.Maznev and A.G.Every, ''Secluded supersonic surface waves in germanium'', Phys. Lett. A 197, 423 (1995).
16. Al.A.Kolomenskii and A.A.Maznev, ''Visualization of laser-generated SAW beams by shake-off of fine particles'', Proceedings of the 1994 IEEE Ultrasonics Symposium, 1-4 November 1994, Cannes, France (IEEE, NY, 1994), p.351-354.
15. A.A. Maznev and A.G.Every, ''Ray surface and focusing of surface acoustic waves on the basal plane of cubic crystals'', Acta Acustica 1, 137 (1994).
14. Al.A.Kolomenskii , A.A.Maznev, V.G.Mikhalevich and H.A.Schuessler, ''Experimental demonstration of surface phonon focusing in anisotropic media using laser induced acoustic pulses'', Journ. de Physique 4, C7-721 (1994).
13. Al.A.Kolomenskii and A.A.Maznev, ''Surface phonon focusing at ultrasonic frequencies'', in Die Kunst of Phonons, ed. by T.Paszkiewicz and K.Rapcewicz (Plenum, New York, 1994).
12. Al.A.Kolomenskii and A.A.Maznev, ''Phonon-focusing effect with laser-generated ultrasonic surface waves'', Phys. Rev. B 48, 14502 (1993).
11. Al.A.Kolomenskii and A.A.Maznev, ''Laser-acoustic cleaning of mechanical microparticles from surfaces'', Bull. Russ. Acad. Sci. Phys. 57, 365 (1993).
10. A.A.Maznev, ''Bleaching of water under the action of giant pulses of a YAG:Er-laser (lambda =2.94 microns) focused into a small spot'', Sov. Phys. Lebedev Institute Reports, No 3-4, 3 (1992).
9. Al.A.Kolomenskii and A.A.Maznev, ''Some applications of SAW pulses photogenerated in silicon'', in Photoacoustic and Photothermal Phenomena III, ed. by D.Bicanic (Springer, Berlin, Heidelberg, 1992).
8. Al.A.Kolomenskii and A.A.Maznev, ''Laser excitation of surface acoustic pulses in isotropic media and single crystals'', Bull. Russ. Acad. Sci. Phys. 56, 1141 (1992).
7. Al.A.Kolomenskii and A.A.Maznev, ''Observation of phonon focusing with pulsed laser excitation of surface acoustic waves in silicon'', JETP Lett. 53, 423 (1991).
6. Al.A.Kolomenskii and A.A.Maznev, ''Shake-off of mechanical microparticles from a silicon surface with surface acoustic waves induced by laser pulses'', Sov. Tech. Phys. Lett. 17, 483 (1991).
5. K.L.Vodopyanov, L.A.Kulevskii and A.A.Maznev, ''Effect of water bleaching for intense emission at a wavelength of 3 microns and control of erbium laser parameters'', in Methods for the control of laser characteristics, Proc. General Physics Inst. Acad. Sci. USSR, vol.28 (Nauka, Moscow, 1991), p.82-101 (in Russian).
4. Al.A.Kolomenskii , A.A.Maznev and V.G.Mikhalevich, ''Laser opto-acoustic effect at the boundary of a strongly absorbing liquid and applications of this effect'', Bull. Acad . Sci. USSR Phys. 54 , 2451 (1990).
3. Al.A.Kolomenskii and A.A.Maznev, ''Surface responses in the laser irradiation of a solid: Rayleigh waves and precursors'', Sov. Phys. Acoust. 36, 258 (1990).
2. Al.A.Kolomenskii and AA.Maznev, ''An analogy between laser excitation of Rayleigh and two-dimensional bulk acoustic waves'', Sov. Phys. Lebedev Institute Reports, No 12, 40 (1989).
1. Al.A.Kolomenskii and A.A.Maznev, ''Acoustical auto-wave instability in absorption of optical radiation'', Bull. Acad. . Sci. USSR Phys. 53, 1167 (1989).
Patents
1. M.J. Banet, M. Fuchs, J.A. Rogers, K.A. Nelson, T.F. Crimmins, A.A. Maznev, "Method and device for simultaneously measuring the thickness of multiple thin metal films in a multilayer structure", US Patent # 6,069,703, May 30, 2000.
2. A.A. Maznev, T.F. Crimmins, K.A. Nelson, "Methods and system for optically correlating ultrashort optical waveforms", US Patent # 6,204,926, March 20, 2001.
3. A. Maznev, "Method for measuring thin metal films", US Patent # 6,587,794, July 1, 2003.
4. A. Maznev, Z. Li, A. Mazurenko, "Opto-acoustic apparatus with optical heterodyning for measuring solid surfaces and thin films", US patent # 7,327,468, February 5, 2008.
5. M. Gostein and A. Maznev, "Method of determining properties of patterned thin film metal structures using transient thermal response", US patent # 7,365,864, April 29, 2008.
6. A. Maznev, “Method of measuring sub-micron trench structures”, US patent # 7,499,183, March 3, 2009.
7. A. Maznev, “Method for measuring thin films”, US patent application # 20070109540.
8. A. Maznev, “Method and apparatus for measuring thickness of thin films via transient thermoreflectance“, US patent application # 20070024871.
9. A. Maznev, C.A. Duran, M. Gostein, A. Mazurenko, G.T. Merklin, P. Rosenthal, A.S. Bonanno, “Measuring diffractive structures by parameterizing spectral features”, US patent application # 20080049214.
10. P. Rosenthal, C. Duran, A. Maznev, A. Mazurenko, “Method of measuring deep trenches with model-based optical spectroscopy”, US patent application # 20090122321.
11. A. Maznev and M. Gostein, “Measuring Trench Structures Using Optical Absorption of the Material in which Trenches are Formed”, US patent application, to be published.