Conference papers

1. “3D nanostructures by stacking pre-patterned fluid-supported single-crystal Si membranes”, L. Cheong, S. Ghadarghadr, C. P. Fucetola, E. E. Moon, and Henry I. Smith, 55th International Conf. of Electron, Ion, and Photon Beam Tech. and Nanofabrication, Las Vegas, NV, 2011.

2. “3D fabrication by stacking prepatterned, rigidly held membranes”, A. A. Patel, C. P. Fucetola, E. E. Moon, and H. I. Smith , 55th International Conf. of Electron, Ion, and Photon Beam Tech. and Nanofabrication, Las Vegas, NV, 2011.

3. “Fast Turn-around Time, Layer-by-Layer Fabrication of 3D Photonic Crystals”, L. T. Varghese, L. Fan, Y. Xuan, L. Zhao and M. Qi, 54th International Conf. of Electron, Ion, and Photon Beam Tech. and Nanofabrication, Anchorage, AK, 2010. (published in J. Vac. Sci Technol. B, 2010).

4. “3D Woodpile Photonic Crystal Fabrication Using a One Step Scaffold Inversion Method”, L. T. Varghese, L. Fan, Y. Xuan, L. Zhao and M. Qi, OSA topical meetings, Integrated Photonics Research, Silicon and Nano Photonics (IPR) / Photonics in Switching (PS), Paper IWE5, Monterey, CA, July, 2010.

5. “Parellel optical lithography using nanoscale bowtie aperture array”, S.M.V. Uppuluri, E.C. Kinzel, L. M. Traverso,  Y. Li, and X. Xu, University Government Industry Micro/nano (UGIM) symposium, Purdue University, West Lafayette, IN, June 2010.

6. “Coherent diffraction lithography: Periodic patterns via mask-based interference lithography”, C. P. Fucetola, A. A. Patel, E. E. Moon, T. B. O'Reilly, and H. I. Smith, 53rd International Conf. of Electron, Ion, and Photon Beam Tech. and Nanofabrication, Florida, 2009.

7.  “Low-cost interference lithography", C. P. Fucetola, H. Korre, and K.  K. Berggren, 53rd International Conf. of Electron, Ion, and Photon Beam Tech. and Nanofabrication, Florida, 2009.

8. “Membrane stacking; A new approach for three-dimensional nanostructure fabrication”, 51st International Conf. of Electron, Ion, and Photon Beam Tech. and Nanofabrication, Denver, CO, 2007.