G. May, "Computational Intelligence in Microelectronics Manufacturing," Chapter
11 in the Handbook of Computational Intelligence in Design and
Manufacturing (J. Wang and A. Kusiak, Eds.), Boca Raton, FL: CRC Press, 2000.
G. May, "Neural Nets for Semiconductor Manufacturing," Wiley Encyclopedia of
Electrical and Electronic Engineering (J.G. Webster, Ed.), vol. 14, pp.
298-323, New York: Wiley, 1999.
M. Baker, F. Williams, and G. May, "A Novel In-Situ Monitoring Technique for
Reactive Ion Etching Using a Surface Micromachined Sensor," IEEE Trans.
Semi. Manufac., vol. 11, no. 2, pp. 254-265, May, 1998. Winner of 1998
Best Paper Award.