S&EF Directory

Directory of Science & Engineering Faculty in Selected Institutions of Higher Education

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Georgia Institute of Technology
School of Electrical & Computer Engineering
777 Atlantic Avenue NW
Georgia Institute of Technology
Atlanta, GA 30332-0250

Phone: 404-894-9420
FAX: 404-894-5028
Email: gary.may@ece.gatech.edu

B.S. Georgia Tech 1985
M.S. UC-Berkeley M.S.
Ph.D. UC-Berkeley Ph.D.

Picture of Gary May
Gary May

Description of Research
Computer-aided manufacturing of integrated circuits and devices. Monitoring, modeling, simulation, control and diagnosis of semiconductor fabrication processes. IC design for manufacturability. IC yield modeling.
Recent Papers or Publications
G. May, "Computational Intelligence in Microelectronics Manufacturing," Chapter

11 in the Handbook of Computational Intelligence in Design and

Manufacturing (J. Wang and A. Kusiak, Eds.), Boca Raton, FL: CRC Press, 2000.

G. May, "Neural Nets for Semiconductor Manufacturing," Wiley Encyclopedia of

Electrical and Electronic Engineering (J.G. Webster, Ed.), vol. 14, pp.

298-323, New York: Wiley, 1999.

M. Baker, F. Williams, and G. May, "A Novel In-Situ Monitoring Technique for

Reactive Ion Etching Using a Surface Micromachined Sensor," IEEE Trans.

Semi. Manufac., vol. 11, no. 2, pp. 254-265, May, 1998. Winner of 1998

Best Paper Award.

Special Honors or Awards
Georgia Tech Outstanding Service Award 1999

Outstanding Paper Award, IEEE Transactions on Semiconductor Manufacturing 1998

Senior Member, IEEE 1997-present

Senior Member, Society of Manufacturing Engineers 1996-present

Georgia Tech Packaging Research Center Faculty of the Year for Education 1996

National Science Foundation National Young Investigator 1993-98

Outstanding Young Alumnus, Georgia Institute of Technology, 1993

National Science Foundation Graduate Fellow 1986-89

AT&T Bell Laboratories Cooperative Research Fellow 1986-91

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