Thickness of silicon dioxide on silicon     
   3.874   -0.016    1.000   0.000
70.00<
 632.800
50<
100<
   1.460    0.000   80.000
   1.000    0.000    0.000
   1.000    0.000    0.000
   0.050    0.050    0.020
   0.008    0.002
0 0 0 0 1
  100  21   9   1
  1  1
Test.dat
Test.pro
511