Thickness and order of SiO2 on GaAs (multiple angles) 3.810 -0.210 1.000 0.000 50;60;70< 632.800 50< 100< 1.900 0.000 80.000 1.000 0.000 0.000 1.000 0.000 0.000 0.050 0.050 0.020 0.008 0.002 0 0 0 0 100 30 9 1 1 1 Test.dat Test.pro 511