Thickness and order of SiO2 on Si (multiple angles) 3.874 -0.016 1.000 0.000 50.00;60.00;70.00< 632.800 50< 100< 1.460 0.000 80.000 1.000 0.000 0.000 1.000 0.000 0.000 0.050 0.050 0.020 0.008 0.002 0 0 0 0 1 100 30 9 1 1 1 Test.dat Test.pro 511