Thickness and refractive index on silicon    Tat       
   3.874   -0.016    1.000   0.000
70.00<
 632.800
30.240<
54.144<
   1.467    0.000  101.800
   1.000    0.000    0.000
   1.000    0.000    0.000
   0.050    0.050    0.020
   0.008    0.002
0 0 0 0 1
  100  22   9  20
  1  1
Test.dat
film.pro
511