Co-sponsored by The Nanostructures Lab, The Tiny Tech Club and Techlink. 

Nanostructures: Top down meet Bottom up 

Professor Henry I. Smith

MIT - Joseph F. and Nancy P. Keithley Professor of Electrical Engineering, MIT

Director - Nanostructures Laboratory at MIT

Background Papers for Talk:

TBA

          In lithography-based planar processing one converts a concept into a fine-scale 2-dimensional template, impressed into a substrate. The function that results depends on the geometry of the template. The applications of the planar process in modern electronics are well known. However, the concept of deriving function from structure is very general; its importance and applications extend well beyond electronics. In this talk the role of lithography-based planar processing in nanoscale science and engineering will be explored, with emphasis on seeking a bridge between “top down” and “bottom up” approaches to nanoscale engineering. Recent research in templated self assembly will be described along with efforts to develop advanced lithography techniques that achieve nanometer-level accuracy.
.  

Henry I. Smith holds the Joseph F. and Nancy P. Keithley Chair in Electrical Engineering at MIT and is Director of the NanoStructures Lab. His research includes nanofabrication, electronic and microphotonic devices, and novel applications of nanostructures. He and his co-workers are responsible for a number of innovations in nanostructures technology and applications including: comformable-photomask lithography, x-ray lithography, the phase-shift mask, the attenuating phase shifter, spatial-phase-locked e-beam lithography, interferometric alignment, graphoepitaxy, templated self-assembly, achromatic-interferometric lithography, zone-plate-array lithography, and a variety of quantum-effect, short-channel, single-electron and microphotonic devices. Prof. Smith is a Fellow of the IEEE and a member of the National Academy of Engineering, the APS, AVS, MRS, OSA and Sigma Xi. He is the recipient of the Cledo Brunetti Award of the IEEE, and has been a visiting scientist at: University College, London (1972); Thompson CSF, Paris (1974); The Norwegian Institute of Technology (1976), Nippon Telegraph and Telephone Corp., (1990), the University of Glasgow (1990), the University of Goettingen (1999), and the Max Planck Institute (1999) under a Humboldt Research Award for Senior US Scientists.

©2003 Massachusetts Institute of Technology