Case 9543

Thick Porous Anodic Alumina Films and Nanowire Arrays Grown on a Solid Substrate

Keywords:

Anodic, PAA, nanowire array, solid substrate

Applications:

Filters, collimators, templates for nano-patterning and nanowire growth, photonic band gap material

Problem:

Free standing anodic films cannot sustain stress.

Technology:

This invention proposes a technology that allows for the fabrication of porous anodic alumina (PAA) films on a wide variety of substrates, including silicon. An additional advance over past PAAs in that it is more durable, and can be fabricated without a barrier layer between the film and substrate, allowing for nanowires to be electrochemically deposited into the honeycomb pattern of pores. This technique offers a unique, facile, and versatile approach for the incorporation of anodic alumina films or arrays of nanowires into a variety of environments and devices.

Advantages:

Allows for the fabrication of PAA films on a wide variety of substrates. PAA films can be grown on patterned and non-planar surface

Inventors:
  • Professor Mildred Dresselhaus (Department of Electrical Engineering and Computer Science, MIT)
  • Professor Akintunde Akinwande (Department of Electrical Engineering and Computer Science, MIT)
  • Oded Rabin (Department of Electrical Engineering and Computer Science, MIT)
  • Yu-Ming Lin (Department of Electrical Engineering and Computer Science, MIT)
  • Paul Herz (Department of Electrical Engineering and Computer Science, MIT)

Intellectual Property:

US Patent Number 7,875,195 issued on January 25, 2011

Publications:

Proceedings of the MRS Fall Meeting 2000, Dec. 22, 2000

MRS Fall Meeting 2000, Nov. 28, 2000

World intellectual property organization, 05/06/2003

Advanced functional materials

Last revised: April 29, 2013

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