Case 10578

Improved Enhancement of P-type/N-type Metal-Oxide-Semiconductor Field Effect Transistors Preserved over a Large Processing Temperature Range

Keywords:

Metal-Oxide-Semiconductor field effect transistors (MOSFET), multi-layer structures, strained layers, semiconductor substrates

Applications:

Various electrical devices such as MOSFETs

Problem:

Need for higher currents in MOSFETs

Technology:

This invention consists of a tri-channel hetero-structure which has a tensile strained semiconductor layer, a compressively strained layer and a confining layer. The thicknesses and doping concentrations of the first two layers are optimized for wide ranges of performance enhancement. The third layer has a band offset with the second layer to confine carriers, and provides a diffusion barrier to the second layer over a large temperature range. A gate dielectric could be disposed over the first, the second or the third layer to form a MOSFET. A method of forming the above structure is also provided.

Advantages:
  • High hole and electron mobilities
  • High performance over a large processing temperature range

Inventors:
  • Professor Eugene A. Fitzgerald(Department of Materials Science and Engineering, MIT)
  • Minjoo L. Lee (Department of Materials Science and Engineering, MIT)
  • Gupta Saurabh (Department of Materials Science and Engineering, MIT)

Intellectual Property:

US Patent Number 7,791,107, issued on September 7, 2010

Publications:

N/A

Last revised: November 12, 2010

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