Case 14051

Wide-Bandwidth MEMS-Scale Piezoelectric Energy Harvester


MEMS, PZT, Energy harvesting


Energy harvester

  • Narrow band-width and poor robustness of traditional PZT energy harvester
  • Low harvested power density of traditional PZT energy harvester


This invention provides a wide-band resonating thin film PZT MEMS energy harvester that harvests energy from parasitic ambient vibration with a wide range of amplitude and frequency via piezoelectric effect. The new design utilizes the tensile stretching strain in doubly-anchored beams that exploits the nonlinearity of the stretching beam to enable a wide-band resonance and thereby a robust power generation amid the uncertainty of the input vibration spectrum. The device can be manufactured by a combination of surface and bulk micromachining processes.

  • Wide bandwidth and high power piezoelectric density energy harvesting

  • Professor Sang-Gook Kim(Department of Mechanical Engineering, MIT)
  • Arman Hajati (Department of Mechanical Engineering, MIT)

Intellectual Property:

U.S. Provisional Patent filed on December 2, 2009



Last revised:November 8, 2010

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