Ultra-High Performance Fast Tool Servos for Diamond
Turning
Acknowledgments
This project is funded by National Science Foundation
under Grant award number DMI-0322590.
Motivation
Manufacturing free-form optical surfaces increasingly
requires fast tool servos with higher bandwidth, higher acceleration, and
higher accuracy. As an alternative solution to conventional piezo-based
micro-positioning devices, electromagnetic actuators working on normal stress
can potentially achieve much better performance than existing state of fast
tool servo technology.
Objectives
Design ultra-high performance fast tool servos
based on novel electromagnetic actuators, high performance precision power
amplifiers, and high performance real-time computers.
Motivation
Manufacturing free-form optical surfaces increasingly
requires fast tool servos with higher bandwidth, higher acceleration, and
higher accuracy. As an alternative solution to conventional piezo-based
micro-positioning devices, electromagnetic actuators working on normal stress
can potentially achieve much better performance than existing state of fast
tool servo technology.
Results
- Our fast tool servos performance:
23kHz closed-loop bandwidth, 1.7 nm RMS positioning error, 2.1 nm RMS error
for tracking 16 micron peak-to-valley sinewave at 3k Hz, 500 G accelration
up to 10 kHz.
- Our linear amplifier has 100kHz band and 1 kW.
- Our real-time computer has achieved 1 MHz sampling rate for a control
loop including 16-bit A/D, control algorithem calcualation, and 16-bit D/A.
Publications
Xiaodong Lu, David L. Trumper, "Ultrafast
Tool Servos for Diamond Turning", Annals of the CIRP
2005, accepted for publiscation.
Last updated on May. 05, 2005
