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Advanced Silicide
Journal Publications
- Zhao H. B., Pey K. L., Choi W. K., Chattopadhyay S., Fitzgerald E. A., Antoniadis D. A. & Lee P. S., “Interfacial Reactions of Ni on Si1-xGex (x = 0.2, 0.3) at Low Temperature by Rapid Thermal Annealing”, Journal of Applied Physics, Vol. 92, No. 1, pp. 214-217 (2002).
- Pey K. L., Choi W. K., Chattopadhyay S., Zhao H. B., Fitzgerald E. A., Antoniadis D. A. & Lee P. S., “Thermal Reaction of Nickel and Si0.75Ge0.25 Alloy”, Journal of Vacuum Science Technology A., Vol. 20(6), pp. 1903-1910 (2002).
- Choi W. K., Pey K. L., Zhao H. B., Osipowicz T. & Shen Z. X., “Nickel Silicidation on Polycrystalline Silicon Germanium Films”, International Journal of Modern Physics B, Vol. 16, Issues 28-29, pp. 4323-4326 (2002).
- Pey K. L., Choi W. K., Chattopadhyay S., Miron Y., Fitzgerald E. A.,
Antoniadis D. A. & Ospowicz T., “On the Stability and Composition of
Ni-ermanosilicided Si1-xGex films”, Journal of Vacuum Science Technology B, Vol. 22(2), pp. 852-858, (2004).
- Li Y. S., Lee P. S. & Pey K. L., “Ti/Co and Co/Ti Silicidation of Poly-Si Capped
Poly-Si0.7Ge0.3 Substrate”, Thin Solid Films, Vol. 462-463, pp. 209-212 (2004).
- Toledo N. G., Lee P. S. & Pey K. L., “Characterization of Junction Leakage
of Ti-Capped Co- and Ni-Silicided Junctions”, Thin Solid Films,
Vol. 462-463, pp. 202-208 (2004).
- Jin L. J., Pey K. L., Choi W. K., Fitzgerald E. A., Antoniadis D. A., Chi D. Z. & Tung C. H., “The Interfacial Reaction of Ni on (111) Ge & (100) Si”, Thin Solid Films, Vol. 462-463, pp. 151-155 (2004).
- Jin L. J., Pey K. L., Choi W. K. , Fitzgerald E. A., Antoniadis D. A., Pitera A. J.,
Lee M. L. & Tung C. H., “Highly Oriented Ni(Pd)SiGe Formation at 400 ºC”,
Journal of Applied Physics, Vol. 97, pp. 104917-1-104917-5.
Conference Publications
- Choi W. K., Pey K. L. & Zhao H. B., “Nickel Silicidation on Polycrystalline Silicon Germanium Films”, 8th International Conference on Electronics Materials, Xian, China, 10-15 June 2002.
- Jin L. J., Pey K. L., Choi W. K., Fitzgerald E .A., Antoniadis D. A., Pitera A. J., Lee M. L. & Chi D. Z., “Study of Nickel (Platinum) (Pt at.% = 0, 5, 10) Germanosilicide Formation using Micro-Raman Spectroscopy”, presented at MRS’04 Spring meeting, USA, April 2004.
- Li Y. S., Lee P. S. & Pey K. L., “Ti/Co and Co/Ti Silicidation of Poly-Si Capped Poly-Si0.7Ge0.3 Substrate”, Presented at ICMAT, Singapore, 7-12 December 2003.
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