3 iCVD Reactors: Maximus, Pancake, Altus
3 oCVD Reactors: CJ, Lux, Neo
Roll to Roll Reactor, configurable for iCVD and oCVD

Additional Processing

  • NTE-3500 Nano-Master Thermal Evaporator, Automatic Sputter Coater, Physical Vapor Deposition System
  • Denton Sputter Coater and Etcher
  • O2 or Ar Plasma Cleaner


  • J.A. Woollham Variable Angle Spectroscopic Ellipsometer
  • Nicolet is50 Fourier Transform Infra-Red Spectrophotometer
  • Hitachi TM3000 Scanning Electron Microscope equipped with Bruker Quantax 70 EDS
  • Olympus DP21 Optical Microscope
  • ADMET Micro EP Minature Testing Machine with Temperature Chamber
  • CH Instruments 600D Electrochemical Analyzer/Workstation
  • Zeta-20 Optical Profiler
  • KP Technology SKP5050 Scanning Kelvin Probe System
  • Agilent Technologies Gass Chromatograph 7890A
  • Janel RM3 4 Probe
  • Rame-Hart Model 250 Contact Angle Goniometer
  • Nanovea Nanoindentor and Nanoscratcher
  • Innovative Technology PureLab HE Glovebox