Microfabrication 101
Kevin T. Turner, J. Lodewyk Steyn
Tue Jan 27, 09am-12:00pm, 2-105
No enrollment limit, no advance sign up
Single session event
A range of fabrication techniques exist today that allow microelectromechanical systems (MEMS), with features that range in size from sub-micron to millimeters, to be constructed. This short-course will provide an overview of the primary microfabrication techniques. Among the topics that will be discussed are thin-film processing, surface and bulk micromachining, wafer bonding, and polymer fabrication techniques. A brief overview of each of the processes and some applications of each will be given. Process capability that exists within the Microsystem Technology Laboratory at MIT will be emphasized. All experience levels are welcome, however the course is designed for people with little to no prior microfabrication experience.
Web: http://web.mit.edu/kturner/www/microfab101/
Contact: Kevin T. Turner, 41-317, 253-7214, kturner@mit.edu
Sponsor: Mechanical Engineering
Latest update: 14-Nov-2003
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