Supplementary material in the form of homework and design problems are provided in pdf format.  Adobe Acrobat Reader is required to view these files.  The software is free of charge. MATLAB scripts are in ".m" files, MAPLE scripts are in ".mws" files, and SIMULINK scripts are in ".mdl" files. You can view these files using any ascii text editor. Chapters without additional homework problems do not have a hyperlink.

Sample SIMULINK model files 

Click HERE to download a text file "mechanical_library.mdl" which contains SIMULINK models for an inertial mass (to illustrate putting blocks together) and several SIMULINK subsystems which implement the spring-mass-dashpot system and the electrostatic actuator examples of Chapter 7.  The subsystems can be dragged into the model window just like SIMULINK function blocks.  To see what is implemented inside the subsystems, use the "Look Under Mask" command.  Once you drag a copy into a model window and look under the mask, you can modify the subsystem version in your model window at will.  We recommend you NOT modify the elements in the library.

Chapter 1: Introduction
Chapter 2: An approach to MEMS design
Chapter 3: Microfabrication
Chapter 4: Process Integration
Chapter 5: Lumped modeling with circuit elements
Chapter 6: Energy-conserving transducers
Chapter 7: Dynamics
Chapter 8: Elasticity
Chapter 9: Structures
Chapter 10: Dissipation and the thermal energy domain
Chapter 11: Lumped modeling of dissipative processes
Chapter 12: Fluids
Chapter 13: Electronics
Chapter 14: Feedback systems
Chapter 15: Noise
Chapter 16: Electronics
Chapter 17: Packaging
Chapter 18: Piezoresistive pressure sensor
Chapter 19: Capacitive accelerometer
Chapter 20: Electrostatic optical projection displays
Chapter 21: Piezoelectric rate gyroscope
Chapter 22: DNA amplification
Chapter 23: Microbridge gas sensor

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