MICROSYSTEM DESIGN
by Stephen D. Senturia
Weller Professor of Electrical Engineering, Emeritus
Massachusetts Institute of Technology
Published by Springer, 2001
This
web site is intended to supplement information provided in the book, Microsystem
Design, in the form of homework problems, design problems, solutions,
scripts (MATLAB, MAPLE, SIMULINK), and errata. In addition, it
facilitates communication with the author to provide comments, errata, and
suggestions for additional homework problems, solutions, and scripts. Some materials can also be found
on web sites for university courses that use this book.
New ERRATA have been posted on July 1, 2011. Please check this link.
University web sites for courses that use this
book (revision in progress). Instructors who wish to use this book in a
university class may contact the author for
information on access to problem solutions. o
Errata (updated July 1, 2011)