Micro and Nano Technology Group



Micro/Nano in MEMS
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Faculty & Research topics:  
   

Development of power MEMS and techniques and applications for self-assembly in micro-scale systems.

Applying MEMS technology to nano-scale manufacturing systems. Nanopelleting, a technology to transform carbon nanotubes into assemblable units integrated into novel microstructures.

 

Compliant mechanisms, ultra-precision fixtures and manipulator, formed and folded mechanisms and machines, layered structure, integrated mechanisms, electronics, actuators, and sensors.

 

3D optical elements and spatial heterodyning for real-time (scan-free) spectral and spatial imaging with high resolution and long working distances; 3D nanophotonics with non-periodic dielectric modulation functions (gradients and discontinuities); 3D nanomanufacturing using the Nanostructured Origami(TM) 3D Fabrication and Assembly method.



 

 
   

 

 

 



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