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Nano/Micro Engineering Group

                                                                                                                                                                                                   
Nano/Micro Engineering Research at Mechanical Engineering

Mission 

Create new engineering knowledge and products on the nano and micro-scale.
Focused efforts include.
  • Identifying and solving grand challenges in micro and nano technologies.
  • Providing design, fabrication and enabling tools to other groups.
  • Educating students about micro and nano science and technologies.

Research

Multi-domain, multi-discipline and multi-scale research projects include,
       Laboratories

Courses offered in this area

2.088
 		Introduction to modeling and Simulation
2.111
 		Quantum Computation
2.373J
 		Materials and Processing of Microelectromechanical Devices & Systems
2.391J
 		Submicro and nanometer technology
2.57 Nano-to-Macro Transport Process
2.60/2.62
Fundamentals of Advanced Energy Conversion
2.71/710
 		Optics
2.717J
 		Optical Engineering
2.751/6.777J
 Design and Fabrication of Microelectromechanical Devices
2.76/760
 Multi-Scale System Design
2.674
 Hands on Micro and Nano Engineering (Lab)
3.153
 		Nanoscale Materials
6.151
 Semiconductor Devices Project Laboratory
6.152/3.155J
 		Micro/Nano Processing Technology
6.720/3.43J
 		Integrated Microelectronic Devices
MAS.962
 		Silicon Biology

 

Faculty in Nano/Micro Engineering

Scool of Engineering  Tiny Technologies Initiative: "Why Small Is BIG at MIT"

Facility
Pappalardo Micro and Nano Engineering Laboratories:
A new nanofabrication facility will be constructed by Spring 2006. The facility will provide 5,490 square feet of space for nanoscale mechanical engineering research and education. A generous gift to the ME Department from Jane and Neil Pappalardo makes this into a reality.

Microsystems Technology Laboratories
The MTL houses three clean room facilities (the Integrated Circuits Laboratory - ICL, the Technology Research Laboratory - TRL, and the NanoStructures Laboratory - NSL), associated non-clean laboratory space (the Research Group Laboratories - RGL), and the Computational and Communication Network facility.
 


Modified on March 28, 2006. webmaster