Micro and Nano Technology Group



Micro/Nano in NanoManufacturing
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Faculty & Research topics:  
   

Chemical Mechanical Polishing, Droplet based manufacturing.

Complexity theory for nano systems design.

Applying MEMS technology to nano-scale manufacturing systems. Nanopelleting, a technology to transform carbon nanotubes into assemblable units to be integrated into multi-scale structures.


 
 

Compliant mechanisms, ultra-precision fixtures and manipulator, formed and folded mechanisms and machines, layered structure, integrated mechanisms, electronics, actuators, and sensors.

Carol Livermore

Development of power MEMS and techniques and applications for self-assembly in micro-scale systems.

 

Alexander Slocum

 

 



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