Electron Probe Micro-Analysis

Massachusetts Institute of Technology | Earth, Atomospheric & Planetary Sciences (EAPS) | EAPS Research Facilities
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MIT Electron Microprobe Facility

Department of Earth, Atmospheric & Planetary Sciencessmall logo
Building & Room: 54-1221; 54-1214
Cambridge, MA 02139
Phone: (617) 253-9678, or (617) 253-9677
Fax: (617) 253-7102
e-mail: e-probe-www@mit.edu

Instrument descriptions

JEOL-JXA-8200 Superprobe

The JEOL-JXA-8200 Superprobe was purchased with funding from the National Science Foundation. Important features of this electron microprobe are:

  • A LaB6 electron gun that generates higher beam currents with smaller spot size compared to conventional W electron guns.
  • A superior electron optical system with a stable beam and automated electron optics that allow changing beam current and accelerating voltage during automated runs.
  • Highly sensitive WDS analyzing crystals and detectors allow accurate trace element analysis.
  • Ultra-light element detectors capable of detecting atomic numbers 4-9 (Be-F).
  • Fast spectrometer and stage motors with excellent step-resolution and reproducibility.
  • Optical auto-focusing eliminates the need for Z-axis jogging while saving stage coordinates of points for automated analysis
  • Detailed and precise WDS scans allow state analysis (e.g., oxidation state and bonding environment causing wavelength shifts).
  • Electron beam autofocus, auto-astigmatism correction, and auto-contrast/brightness provide easier acquisition of high quality images.
  • The cathodoluminesence system has wavelength discrimination capability for mapping and spectroscopy that allow phase characterization and identification of trace impurities in minerals.
  • Software enhancement enables imaging of irregular shaped planar and curved surfaces.
  • Complete remote control.
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