Electron Probe Micro-Analysis

Massachusetts Institute of Technology | Earth, Atomospheric & Planetary Sciences (EAPS) | EAPS Research Facilities
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MIT Electron Microprobe Facility

Department of Earth, Atmospheric & Planetary Sciencessmall logo
Building & Room: 54-1221; 54-1214
Cambridge, MA 02139
Phone: (617) 253-9678, or (617) 253-9677
Fax: (617) 253-7102
e-mail: e-probe-www@mit.edu

Instrument descriptions

JEOL-JXA-8200 Superprobe

We have recently puchased a JEOL-JXA-8200 Superprobe with funding from National Science Foundation. The instrument has been installed successfully and is operating smoothly. Important features of the new JEOL-8200 are:

  • A LaB6 electron gun that generates higher beam currents with smaller spot size compared to conventional W electron guns.
  • A superior electron optical system with a stable beam and automated electron optics that allow changing beam current and accelerating voltage during automated runs.
  • Highly sensitive WDS analyzing crystals and detectors allow accurate trace element analysis.
  • Ultra-light element detectors capable of detecting atomic numbers 4-9 (Be-F).
  • Fast spectrometer and stage motors with excellent step-resolution and reproducibility.
  • Optical auto-focusing eliminates the need for Z-axis jogging while saving stage coordinates of points for automated analysis
  • Detailed and precise WDS scans allow state analysis (e.g., oxidation state and bonding environment causing wavelength shifts).
  • Electron beam autofocus, auto-astigmatism correction, and auto-contrast/brightness provide easier acquisition of high quality images.
  • The cathodoluminesence system has wavelength discrimination capability for mapping and spectroscopy that allow phase characterization and identification of trace impurities in minerals.
  • Software enhancement enables imaging of irregular shaped planar and curved surfaces.
  • Complete remote control.

JEOL-JXA-733 Superprobe upgrade

The JXA-733 runs on a PC-based user platform with the Geller Microanalytical Lab automation system that provides flexibility for data reduction, large area scanning electron imaging and X-ray mapping by rastering the beam or the stage. The dSspec system automates the microprobes, whereas the dQant32 and dPict32 programs enable quantitative analysis and digital imaging capabilities. The microprobe is equipped with LDE1 (2d=60 angstrom) and LDEC (2d=98 angstrom) synthetic multilayered diffracting elements for ultra-light element (B-F) detection.

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