GHz Ultrasonic Imaging with CMOS integrated Piezoelectric Transducers

3rd November 2021

Timing : 1 pm EST

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For a list of all talks at the NanoBio seminar Series Fall'21, see here


The relatively easy integration of piezoelectric Aluminum Nitride films on CMOS wafers has created an opportunity for highly integrated sensors and actuators. One of the sense/actuate example is that if ultrasonic pulse transmission and reception for ultrasonic imagers and sensors. In our group we have focused on scaling eth frequencies to several gigahertz to achieve micro-sonar imaging withing the silicon substrate. This talk will present recent results in fully integrated imaging chips that can enable imaging of microscopic biological entities such as nematodes, fungi, and bacteria. This approach enables new family of microscope-on-a-chip capability, that can be universally complement and supplant micro imaging.