This area is the hallway between the 1st and 2nd equipment bay inside the ICL cleanroom. The official MIT room number is 39-267A. The nearest phone is x3-0978 located in this area, between bay 1 and 2.

---

Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	ICL	rainbow	Etch	RIE	Chlorine based plasma etcher for metals	Green